Quiet
Low noise and vibration levels, perfectly suited for vibration-sensitive applications in semiconductor manufacturing processes and analytical instrumentation
Flexible
Compatible with a variety of backing pumps, excellent compression ratio for light gases
Maintenance-free
No wearing parts thanks to magnetic bearing technology, long maintenance intervals
Technical specifications
Markets & applications
Automotive and Transport
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Space Research
Display
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Physical vapor deposition (PVD)
R&D
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High Energy Physics
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Photonics Research
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Space Research
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Ultra-High Vacuum
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Plasma Physics
Semiconductor
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LPCVD / Diffusion
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PVD
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Inspection & Metrology
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Si Poly etch
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Light deposition
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Ion Implantation
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PECVD
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Lithography
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Metal & high K etch
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Oxyde Etch
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Load Lock & Transfer
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Cobalt, WCVD, TiN & TDMAT
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ALD