Quiet
Low noise and vibration levels, perfectly suited for vibration-sensitive applications in semiconductor manufacturing processes and analytical instrumentation
Flexible
Compatible with a variety of backing pumps, MT version with integrated heating system for demanding chemical conditions, frequency-controlled direct current (DC) motors
Compact
Small footprint, integrated drive unit, installation in any orientation
Technical specifications
Markets & applications
Medical
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Diagnostic Imaging
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Medical Accelerator
R&D
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Photonics Research
Semiconductor
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LPCVD / Diffusion
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PVD
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Inspection & Metrology
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Si Poly etch
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Light deposition
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Ion Implantation
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PECVD
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Lithography
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Metal & high K etch
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Oxyde Etch
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Load Lock & Transfer
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Cobalt, WCVD, TiN & TDMAT
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ALD