TORRI BD 0100–0600 A
Multi-stage roots vacuum pumps
Flexible
Shortest pump-down time for load lock chambers
Efficient
Extremely low energy consumption, minimal maintenance, high uptime
Compact
Exceptionally small and light-weight
Technical specifications
Markets & applications
R&D
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Photonics Research
Semiconductor
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PVD
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Inspection & Metrology
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Ion Implantation
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Lithography
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Load Lock & Transfer
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Annealing
Thin Film Coating
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Lab coating