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Filter Systems

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Our particle filter systems reduce fine dust emissions from particulate-forming processes to a minimum. This allows particle-loaded exhaust air flows to be efficiently cleaned. If required, the particle filter can be installed downstream of our thermal gas abatement systems, to ensure that other harmful substances in the waste gas, such as PFCs (perfluorocarbons), are safely removed.

CT-PF particle filter

  • Clean
  • Safe
  • Maintenance-free

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Benefits of the CT-PF particle filter

The CT-PF particle filter is a dry filtration system designed for effective removal of fine particulate matter from process exhaust. It uses only nitrogen or compressed air and electricity for operation. Highly efficient and durable filter elements capture fine dust, significantly reducing the manual effort required to clean exhaust ducts and minimizing fine dust emissions. The system ensures compliance with the German fine dust emission regulations (20 mg/Nm³) and achieves values well below this limit.

An additional hook-up kit with an integrated, frequency-controlled fan maintains the constant vacuum level required by the process. The filters are cleaned fully automatically, which allows continuous operation without process interruption. Separated particulates are safely collected in an easily replaceable bag that can be removed and exchanged while the filter is running. The system’s compact, low-maintenance design is well-suited for applications in the semiconductor, photovoltaic, LED, chemical, and industrial gas industries, as well as in universities and research institutes.