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7.4 Portfolio overview

The portfolio of mass spectrometers and gas analyzers is described in chapter 6.

Pfeiffer Vacuum has the widest range of helium leak detectors. An overview is given in Table 7.4.
  •  
    Quartz window sensor
    Sector field MS
    Vacuum methods

    Sniffing methods
    Test leak integrated
    Portable
    ASM 310
     
    Multipurpose
    ASM 340
     
    High performance
    ASM 390
     
    ASM 392
     
    Modular
    ASI 35
     
    Sniffing
    ASM 306 S
     
     
     

    Table 7.4: Pfeiffer Vacuum leak detectors

The extensive portfolio allows units that are specially designed for the particular application to be selected. The most important characteristics are:

  • ASM 310: The smallest and lightest leak detector for vacuum and sniffer testing with a full-fledged integrated pump system. Excellent detection sensitivity due to mass spectrometric detector.
  • ASM 340: The newest Pfeiffer Vacuum leak detector incorporating the combined experience of all our production sites. Powerful pump system and downward compatibility with the ASM and HLT series of leak detectors make it the most all-round leak detector.
  • ASM 390/392: Developed specifically for the semiconductor industry and coating systems. The slim design make it mobile and maneuverable even in narrow aisles between production machinery. The high helium pumping speed provides unrivaled sensitivity even if used with auxiliary pumps and the oil-free and particle-free backing pump make it suitable for cleanroom use.