User-friendly
Large and rotatable color touch display, integrated tool box and storage space
High performance
Fast start-up, high pumping speed, perfectly suited for demanding applications in clean environments
Flexible
Compact and ergonomic design, easy access to all testing areas
Technical specifications
Markets & applications
Automotive and Transport
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Leak Detection and EoL Testing
Battery
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Leak Detection and EoL Testing (Master)
Chemical
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Leak Detection
Display
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Load Lock Chambers
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Plasma-enhanced chemical vapor deposition (PECVD)
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Physical vapor deposition (PVD)
Hydrogen Economy
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Leak Detection and EoL Testing (Master)
Medical
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Leak Testing Of Medical Devices
Pharma and Biotech
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Leak Detection
R&D
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High Energy Physics
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Leak Detection
Refrigeration and Air Condition
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Leak Detection and EoL Testing
Semiconductor
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LPCVD / Diffusion
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High flow applications
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Stripping / Ashing
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PVD
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Inspection & Metrology
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Si Poly etch
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Light deposition
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Ion Implantation
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PECVD
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Lithography
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Metal & high K etch
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Oxyde Etch
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Load Lock & Transfer
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Cobalt, WCVD, TiN & TDMAT
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ALD
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Annealing
Technical Gases
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Liquefaction
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Insulation Vacuum
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Gas Transport
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Bottle Filling
Thin Film Coating
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Lab coating