Reliable
Hydrocarbon-free, automatic sensor calibration during operation
Quiet
Low noise and vibration levels
Maintenance-free
Electromagnetic suspension protecting rotor from premature wear, continuous rotor imbalance compensation
Technical specifications
Markets & applications
Automotive and Transport
-
Space Research
Chemical
-
Laboratory Vacuum
Medical
-
Lab Vacuum
Pharma and Biotech
-
Laboratory Vacuum
R&D
-
Photonics Research
-
Space Research
-
Ultra-High Vacuum
-
Laboratory Vacuum
Semiconductor
-
LPCVD / Diffusion
-
Stripping / Ashing
-
PVD
-
Inspection & Metrology
-
Si Poly etch
-
Light deposition
-
Ion Implantation
-
PECVD
-
Lithography
-
Metal & high K etch
-
Oxyde Etch
-
Load Lock & Transfer
-
ALD