Reliable
Best-in-class hybrid bearing technology, superior bearing lubrication for long life cycle
High performance
Optimized rotor geometry, enhanced gas load handling
High gas throughput
High pumping speed, compatible with a variety of backing pumps, high compression for light gases
Technical specifications
Markets & applications
Automotive and Transport
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Space Research
Medical
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Diagnostic Imaging
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Medical Accelerator
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Mass spectromer
Power Generation
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Green Energy Generation
R&D
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Space Research
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Ultra-High Vacuum
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Mass Spectrometry
Scientific Instruments
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Mass Spectrometry
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Surface Analysis
Semiconductor
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LPCVD / Diffusion
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Stripping / Ashing
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PVD
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Inspection & Metrology
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Si Poly etch
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Light deposition
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Ion Implantation
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PECVD
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Lithography
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Metal & high K etch
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Oxyde Etch
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Load Lock & Transfer
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ALD
Technical Gases
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Bottle Filling
Accessories
- Electrical adapter
- Mains cable
- Connecting cable
- Various fieldbus systems
- Power supply kit and display unit
- Mounting kit
- Safety valve
- Venting accessories
- Power failure venting unit
- Vibration damper