A 3004
Multi-stage roots vacuum pumps
Robust
Specially designed for very harsh processes, high particle tolerance, excellent corrosion resistance
Reliable
Extended lifetime
High performance
Best- in-class compression ratio, lowest power consumption on the market
Technical specifications
Markets & applications
Semiconductor
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LPCVD / Diffusion
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Stripping / Ashing
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Si Poly etch
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Light deposition
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PECVD
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Lithography
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Metal & high K etch
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Cobalt, WCVD, TiN & TDMAT
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ALD
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Annealing
Solar
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Cell Manufacturing