Semiconductor Services

Let us take responsibility for your vacuum and abatement systems – no matter which brand.

Remanufacturing

The new vacuum pump remanufacturing service from Pfeiffer for semiconductor manufacturing. Don’t stop business, reduce downtime risk.
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Full sub-fab management

Holistic on-site service solution for a safe and stable production environment in your semiconductor fab.
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Gas abatement services

Comprehensive service packages, following the design and installation of your cleaning system.
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ARGOS

ARGOS is a comprehensive, on-site predictive maintenance service that monitors every event and change across your semiconductor fab.
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Semiconductor service locations

Find your semiconductor service location.
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Semicon news from Pfeiffer

Pfeiffer Vacuum+Fab Solutions Introduces UltiDry Multi-Stage Roots Vacuum Pumps

Pfeiffer Vacuum+Fab Solutions, a member of the global Busch Group, presents the new UltiDry multi-stage roots vacuum pumps. Designed for demanding semiconductor applications, the UltiDry combines robust performance with high energy efficiency and process flexibility.

Pfeiffer Vacuum+Fab Solutions at SEMICON Taiwan 2025

Pfeiffer Vacuum+Fab Solutions – a member of the global Busch Group – presented its comprehensive portfolio for the semiconductor industry at SEMICON Taiwan 2025, which took place from September 10 to 12 at the Taipei Nangang Exhibition Center.

Pfeiffer Presents Advanced Vacuum Solutions at SEMICON India 2025

Pfeiffer Vacuum+Fab Solutions, a member of the global Busch Group, is proud to announce its participation at SEMICON India 2025, taking place from September 2 to 4 at Yashobhoomi (India International Convention Centre) in New Delhi, bringing vacuum and gas abatement technologies to India’s rapidly growing semiconductor sector.

Pfeiffer Vacuum+Fab Solutions at SEMICON Southeast Asia 2025

Pfeiffer Vacuum+Fab Solutions – a member of the Busch Group and a global leader in vacuum and gas abatement technology – concluded a highly successful showcase at SEMICON Southeast Asia 2025. The event took place from May 20 to 22 and was the first SEMICON Southeast Asia in Singapore since 2013.

Showcasing Innovation: Busch Group at SEMICON China 2025

The three companies of the Busch Group – Busch Vacuum Solutions, Pfeiffer Vacuum+Fab Solutions and centrotherm clean solutions – will present their extensive range of vacuum solutions jointly at SEMICON China 2025.

Pfeiffer Vacuum+Fab Solutions Presents the New HiScroll 46

Pfeiffer Vacuum+Fab Solutions – a member of the global Busch Group – announces the launch of the HiScroll 46, the newest member of its HiScroll series.

Joint Appearance of the Busch Group Companies at Semicon Korea 2025

The three companies of the Busch Group – Busch Vacuum Solutions, Pfeiffer Vacuum+Fab Solutions and centrotherm clean solutions – announce their joint presence at Semicon Korea 2025.

Joint Appearance of the Busch Group Companies at Semicon Japan 2024

The three companies of the Busch Group – Busch Vacuum Solutions, Pfeiffer Vacuum+Fab Solutions and centrotherm clean solutions – announce their joint presence at Semicon Japan 2024.