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Vacuum Pumps

Discover our wide range of pumps for vacuum generation


From rough to ultra-high vacuum, we offer a diverse selection of reliable and powerful vacuum pumps. Learn more about our products and solutions for various applications in semiconductor, industry as well as Research & Development.

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Turbomolecular vacuum pumps

Turbomolecular vacuum pumps are high-speed vacuum pumps used in combination with backing pumps to achieve extremely high vacuum levels down to 10-11 hPa (mbar). They are oil-free and very energy-efficient. Turbopumps find application in demanding fields such as plasma etching, surface analysis and coating technology.

Turbomolecular vacuum pumps

Turbomolecular vacuum pumps are high-speed vacuum pumps used in combination with backing pumps to achieve extremely high vacuum levels down to 10-11 hPa (mbar). They are oil-free and very energy-efficient. Turbopumps find application in demanding fields such as plasma etching, surface analysis and coating technology.

Vacuum boosters

In combination with suitable backing pumps, oil-free vacuum boosters provide a robust and reliable solution for fast pump-down. They can be used flexibly and customized for many applications.

Vacuum boosters

In combination with suitable backing pumps, oil-free vacuum boosters provide a robust and reliable solution for fast pump-down. They can be used flexibly and customized for many applications.

Diaphragm vacuum pumps

Diaphragm vacuum pumps offer dry vacuum generation and are therefore ideal for applications where an oil-free environment is required. Their quiet performance and compact design make them ideal for use in medical devices, laboratory equipment, and analytical applications.

Diaphragm vacuum pumps

Diaphragm vacuum pumps offer dry vacuum generation and are therefore ideal for applications where an oil-free environment is required. Their quiet performance and compact design make them ideal for use in medical devices, laboratory equipment, and analytical applications.

Screw vacuum pumps

Screw vacuum pumps combine high pumping speed with a robust, oil-free design, making them ideal for a wide range of industrial applications – from metallurgy to freeze-drying. They are effective, reliable, and deliver consistently high performance.

Screw vacuum pumps

Screw vacuum pumps combine high pumping speed with a robust, oil-free design, making them ideal for a wide range of industrial applications – from metallurgy to freeze-drying. They are effective, reliable, and deliver consistently high performance.

Scroll vacuum pumps

Scroll vacuum pumps deliver high performance with low noise levels, making them ideal for laboratories, semiconductor manufacturing, and vacuum drying. Their oil-free design ensures clean operation and high efficiency.

Scroll vacuum pumps

Scroll vacuum pumps deliver high performance with low noise levels, making them ideal for laboratories, semiconductor manufacturing, and vacuum drying. Their oil-free design ensures clean operation and high efficiency.