A 804-1804 XN
Multi-stage roots vacuum pumps
Robust
Perfectly suited for harsh semiconductor processes, nickel coating for increased corrosion resistance, design options for dealing with by-product generation
Reliable
Extended lifetime
Efficient
High-efficiency motors, limited use of electric heaters, cost-efficient
Technical specifications
Markets & applications
Dairy
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Cheese Production - Cheese vacuum chambers
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Cheese production - cheese towers
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Butter Production
Semiconductor
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LPCVD / Diffusion
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Stripping / Ashing
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PVD
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Si Poly etch
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Light deposition
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PECVD
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Metal & high K etch
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Oxyde Etch
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Annealing