High temperature and flow
Wide process range, high corrosion resistance
Self-diagnostics
Built-in sensor for performance diagnostics, maintenance optimizations and external communications
Economical
Optimized temperature management, low power and cooling water consumption, low cost of ownership
Technical specifications
Markets & applications
Display
-
Physical vapor deposition (PVD)
Semiconductor
-
LPCVD / Diffusion
-
PVD
-
Inspection & Metrology
-
Si Poly etch
-
Light deposition
-
Ion Implantation
-
PECVD
-
Lithography
-
Metal & high K etch
-
Oxyde Etch
-
Load Lock & Transfer
-
Cobalt, WCVD, TiN & TDMAT
-
ALD
Thin Film Coating
-
Optical Coating
-
Decorative Coating
-
Wear Protection Coating
Accessories
- Protective seal gas purge valve
- Cooling water valve
- Handheld remote control
- Protective filter for inlet flange
- Mounting kit
- Inlet flanges: VG350 or VG400
- Exhaust flanges: DN40 or DN50
- Various heating options
- Additional middle purge for harsh processes
- Rotor temperature sensor
- Purge presence sensor
- Input power: 200, 440 or 480 VAC