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Essential for the design of a vacuum system
Vacuum valves play a crucial role in the design and functionality of vacuum systems, ensuring precise control and reliability across various industries and research applications.
Our valve portfolio includes a wide range of pressure control valves and isolation valves, available with different actuators and flange types to meet diverse operational needs.
Manual valves can be operated without any electronics via a hand wheel or a quick-closing/quick-opening mechanism.
Hand wheels provide precise, gradual control for smooth operation, while quick-opening/closing mechanisms enable rapid actuation for fast isolation or emergency situations.
Pneumatically actuated valves require an oil-free compressed air supply. This is used to move an internal piston, which opens or closes the valve.
Electric actuation utilizes motors to convert electrical energy into precise mechanical movement. This opens or closes the valve without the need for compressed air.
Valves with electro-pneumatic actuation contain a pneumatically actuated valve with a built-in solenoid valve to control the compressed air supply.
A solenoid valve is an electrically controlled valve that opens or closes when a magnetic field is generated by an electric current.
This allows the valve to be operated remotely via an electrical signal, combining the fast and reliable motion of pneumatic actuation with the convenience and control of electronic switching.
A vacuum valve is a mechanical component that controls the flow of gases within a vacuum system.
Each valve has a different role: It may simply open or close to start or stop gas flow, or it may control the flow to help establish or maintain a desired pressure level. Some valve types can also redirect gas – such as by venting a vacuum chamber with clean, dry gas – to safely bring the system back to atmospheric pressure or protect sensitive components during shutdown.
Vacuum valves come in various forms with different actuation methods, including manual, pneumatic, and electrical designs.
Vacuum valves are used in combination with vacuum pumps and vacuum chambers. They are essential for reliable and precise operation in applications such as semiconductor manufacturing, thin-film coating, and in research laboratories.
Each valve type serves a specific function within a vacuum system.
The overview below highlights the main characteristics and use cases to help you choose the right one for your application.
Valve type | Typical function | Key advantages | Typical applications |
|---|---|---|---|
Gate valve | Opens and closes with a flat plate to isolate sections | Very high conductance, suitable for high and ultra-high vacuum | Load locks and transfer chambers, coating systems, isolation of turbopumps |
Angle valve | Redirects gas flow by 90° using a seal, plug and stem | Compact design suitable for systems with piping restrictions that need a change in direction of flow | General vacuum systems, R&D setups, all markets |
Butterfly valve | Rotating disk to isolate or control flow | Lightweight, quick actuation | |
Ball valve | On/off flow control via a pivoting ball | Compact and robust design, fast actuation | Industrial and automotive systems, semiconductor |
Diaphragm valve | Flow control via a flexible membrane | Clean operation, low risk of contamination | |
Pendulum valve | Flat sealing motion with a rotating gate | Suitable for tight spaces, high conductance, minimal particles | Semiconductor and thin-film deposition, isolation of turbopumps |
Vent valve | Allows controlled venting to atmosphere to relieve excess pressure | Safe pressure equalization, protects components | Maintenance and chamber venting |
Valves can be operated in three different ways: manually, pneumatically, and electrically.
There are several criteria you should consider to find a suitable vacuum valve for your application.
Series E vacuum valves are a direct replacement for pneumatically and electropneumatically actuated valves, combining their robustness and functionality with the benefits of fully electric actuation. They eliminate the need for compressed air and external solenoid valves while avoiding the typical drawbacks of electromagnetically actuated valves, such as high power consumption, limited positioning accuracy, and increased heat generation. This results in precise, reliable valve control with lower energy use and simplified system integration.
Our pressure control valves incorporate two key innovations designed for exceptional performance:
Vacuum valves are suitable for all vacuum applications, with the choice of valve depending on the sealing technology required for specific pressure levels:
Seals and sealing methods play a decisive role in the selection of the right valve for the vacuum system.
As the temperature resistance and outgassing rates vary, the choice of seal is ultimately decided according to the demands of the process. This includes the necessary temperature resistance and the required vacuum level.
At Pfeiffer, you will find a broad range of high vacuum valves for different installation and performance needs. The choice of the right valve depends on several factors, including the process sequence, process temperature, ultimate vacuum, and gas composition. High and ultra-high vacuum systems require valves that combine reliable sealing, high conductance, and durability.
