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Full Sub Fab Management

Holistic on-site service solution. For a safe and stable manufacturing environment. And your peace of mind.

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You focus on the main purpose of a semiconductor fab: the manufacturing of state-of-the-art microchips. We keep your vacuum and abatement systems up and running. With our highly experienced on-site service teams.

Pfeiffer Vacuum+Fab Solutions offers full sub fab management concepts, or any on-site service solution tailored to your requirements. To support you the way you need it.

Hundreds of service engineers and technicians are permanently based at customer sites, providing advanced on-site service and fast support. Wherever you are, whenever you need it.

Our service teams are certified according to ISO9001:2016, ISO14001:2015, and ISO45001:2018 standards.

We are the leading full sub fab management supplier, ensuring maximum availability of your sub fab systems. Lean back and let us do the service.

What you get

Dedicated service experts

  • Hundreds of highly skilled on-site service technicians specialized in semiconductor manufacturing
  • Over 30 years of experience in servicing vacuum and abatement systems
  • Extensive sub fab management, system, and process consultancy expertise

Maximum availability

  • Service concept tailored to your demands with preventive maintenance
  • Reduced risk of unexpected breakdowns, minimizing production downtime
  • Worldwide presence of semiconductor service facilities to support the full sub fab service team

High Pfeiffer standards

  • ISO9001:2016, ISO14001:2015, and ISO45001:2018 standards
  • Tried and tested service procedures
  • For all medium and high vacuum systems of all brands

How it works

Semiconductor service full sub fab management
We will begin with a detailed analysis of your entire vacuum process and abatement environment. This results in a compilation of all your abatement systems, vacuum pumps and system components, along with their individual process requirements. Based on this information, we will suggest the optimum sub fab management solution for you.

It considers all abatement systems, vacuum pumps and system components, including foreline/exhaust services, parts cleaning and hook-up support. We consider the different life cycles of wearing parts, carry out routine services, and supply the spare parts needed. All of which we plan into your process requirements to cause as little disruption to your production as possible.

Semiconductor services

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    Remanufacturing

    The new vacuum pump remanufacturing service from Pfeiffer for semiconductor manufacturing. Don’t stop business, reduce downtime risk.

    Learn more
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    ARGOS

    ARGOS is a comprehensive, on-site predictive maintenance service that monitors every event and change across your semiconductor fab.

    Learn more