- Maintenance-free
- Efficient
- Safe
Dry Bed Absorber
Many manufacturing processes generate harmful substances and gases that, without intervention, would be released to the environment. The CT-D dry bed absorber product series from Pfeiffer encompasses three products: the CT-D point-of-use absorber, the CT-D-E emergency absorber, and the CT-D-VLC to absorb residual gas during bottle changes.
These passive abatement systems offer many advantages due to minimal facility requirements. Besides an electrical supply, the dry bed absorber series only needs compressed air or nitrogen for valve activation. These systems have a small footprint and safely absorb the most toxic and harmful gases, such as arsine (AsH3) and phosphine (PH3).
Dry bed absorbers from Pfeiffer find their place in a variety of industries, but particularly in the manufacture of semiconductor, photovoltaic and LED technologies. In addition, it is suitable for universities and research institutions.
Benefits
Chemisorption of reactive, toxic, and corrosive gases under the highest safety standards.
Electrochemical clean gas monitoring and integrated bypass mode so that the absorption process can be carried out even when the main absorbent is saturated.
Various granulate container sizes to match different absorption requirements.
Discover our product series
CT-D point-of-use absorber
Benefits
The CT-D point-of-use absorber requires only electricity and compressed air or nitrogen (N₂) for operation, making it easy to integrate into existing infrastructure and ensuring minimal media consumption. Maintenance requirements are low, supported by a patented absorber design that includes a cold trap to prevent blockages and extend granulate service life. Together, these factors significantly reduce operating costs.
The granulate has been specially developed for use in semiconductor, photovoltaic and other special gas applications, ensuring high performance and safety in demanding environments. Through chemisorption, the granulate in the container and bypass absorbs toxic, corrosive, or flammable gases and their by-products, converting them into non-volatile, inorganic solids. This results in gas concentrations at the exhaust that are reliably kept below threshold limit value (TLV) levels.
Modules are available with 30-, 60-, 120-liter container sizes, offering flexibility for different plant configurations while maintaining a minimal footprint. Each unit is fully equipped with a touch display, endpoint detection, bypass functionality, and inlet pressure sensor technology. Endpoint detection identifies when the absorber granulate is saturated and redirects to the bypass. Here, the granulate absorbs the remaining gases, allowing the process to be completed and avoiding the escape of any untreated toxic gases.
CT-D-E emergency absorber
Benefits
The hazardous gases used in processes such as semiconductor manufacture are typically supplied from cylinders in a cabinet under vacuum, known as a gas cabinet. The CT-D-E offers a high level of safety for your gas supply installations by reliably capturing the contaminated ambient air caused by a leak of one or more gas cylinders in the event of a failure or emergency. It operates passively, requiring no electricity or additional media supplies.
Each absorber is individually designed in size and configuration to meet your specific requirements. Furthermore, the exact granulate or granulate mixture is defined by the application for the best absorption capabilities of toxic, corrosive and flammable products and by-products. Through chemisorption, harmful gases are permanently bound to the granules, eliminating any risk of desorption and ensuring long-term containment.
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CT-D-VLC ventline cartridge
Absorbs residual gas during gas bottle changes for safe and effective purging of process gas pipes
Designed to handle small amounts of purge gas, also known as vent gas, the chemisorption process of the CT-D-VLC absorber ensures safe and irreversible absorption across a wide range of gases and applications during gas bottle changes. This provides a reliable safety measure in critical gas supply environments.
Even in the event of a malfunction that results in a cylinder discharging at full pressure, the system operates safely within the permissible pressure range.
With a stainless-steel TÜV-tested pressure vessel rated up to 220 bar, the CT-D-VLC offers maximum operational safety. Its compact design, without sensors, display or other electronics, allows it to be integrated directly into pipes or gas cabinets. The absorber is mounted using an optional durable stainless-steel bracket and can be economically refilled, making it a cost-effective and space-saving solution that provides a long service life.
Designed to handle small amounts of purge gas, also known as vent gas, the chemisorption process of the CT-D-VLC absorber ensures safe and irreversible absorption across a wide range of gases and applications during gas bottle changes. This provides a reliable safety measure in critical gas supply environments.
Even in the event of a malfunction that results in a cylinder discharging at full pressure, the system operates safely within the permissible pressure range.
With a stainless-steel TÜV-tested pressure vessel rated up to 220 bar, the CT-D-VLC offers maximum operational safety. Its compact design, without sensors, display or other electronics, allows it to be integrated directly into pipes or gas cabinets. The absorber is mounted using an optional durable stainless-steel bracket and can be economically refilled, making it a cost-effective and space-saving solution that provides a long service life.
Customized absorber and adsorber solutions
Reliable cleaning of special exhaust flows
A customized absorber and adsorber solution is ideal if none of our other technologies completely fits your needs. After a close examination of your process and extensive discussions with you, we will develop a system to perfectly match your individual requirements. Such a system offers passive operation using dry bed absorbers with tailored granulates such as activated carbon for VOC (volatile organic compound) removal.
It features low media consumption and long service life, with minimal installation and maintenance requirements. In addition, the system you receive has been individually designed to optimize and prolong adsorbent replacement intervals. A wide range of optional safety features allows seamless integration into fully automatic plant control and monitoring systems. An established refill system with comprehensive service ensures continued efficiency and reliability.
A customized absorber and adsorber solution is ideal if none of our other technologies completely fits your needs. After a close examination of your process and extensive discussions with you, we will develop a system to perfectly match your individual requirements. Such a system offers passive operation using dry bed absorbers with tailored granulates such as activated carbon for VOC (volatile organic compound) removal.
It features low media consumption and long service life, with minimal installation and maintenance requirements. In addition, the system you receive has been individually designed to optimize and prolong adsorbent replacement intervals. A wide range of optional safety features allows seamless integration into fully automatic plant control and monitoring systems. An established refill system with comprehensive service ensures continued efficiency and reliability.
