Please update your browser. It looks like you are using an old version of the Microsoft Edge browser. To get the best experience with the Pfeiffer website, please update your browser.

Wet Gas Treatment

Wet Gas Treatment

During many manufacturing processes, harmful substances are produced that, without intervention, would be released with the waste gas. Wet scrubbing allows water-soluble substances to be scrubbed and bound to the washing liquid, after which they can be safely disposed of. Our CT-W product series offers the right wet scrubbing solution for every application in various industries. From semiconductor manufacturing to the production of LEDs and photovoltaics, as well as in universities and other research institutions.

Benefits

High efficiency with two wet stages

Efficient removal of water-soluble gases and particles

Internal neutralization to minimize freshwater consumption

Discover our wet scrubbers

  • wet_gas_treatment_ct_w

    CT-W wet scrubber (point-of-use)

    To treat waste gases from various applications

    Learn more
  • ct_w_central_wet_scrubber_1

    CT-W central wet scrubber (end of pipe)

    For waste gas treatment in applications with high gas flows

    Learn more

CT-W wet scrubber (point-of-use)

wet_gas_treatment_ct_w
  • Efficient
  • Easy servicing
  • Robust

Learn more

Benefits of the CT-W (point-of-use)

The CT-W offers efficient treatment of HCl, HF, SiH2Cl2, SiCl4 and NH3 along with other acidic and alkaline waste gases in applications such as etching and epitaxy. As it uses minimal fresh water in its process, operating costs are kept low.

This scrubber is flexible and can be operated using either acidic or alkaline neutralizing agents. These serve to neutralize the wastewater, the pH of which is altered during scrubbing depending on the gases being processed.

Uptime enhancements such as mechanical inlet cleaning, N2 Venturi flushing and heated exhaust gas inlets for WF6, BCl3, AlCl3 and NH4Cl are possible, ensuring uptime of over 99%. Furthermore, maintenance is fast and easy.

An explosion-proof version for high H2 exhaust flows is also available.

CT-W central wet scrubber (end-of-pipe)

ct_w_central_wet_scrubber_1
For high-volume flow gas treatment

  • Efficient
  • Easy servicing
  • Customizable configurations

Benefits of the CT-W (end-of-pipe)

The CT-W wet scrubber is an end-of-pipe central scrubber with very high cleaning efficiency for water-soluble gases, including NH3, HCl, HF, methanol, and ethanol. Designed for high gas flows, it contains several high-pressure counterflow nozzles for the effective cleaning and separation of the smallest particulate matter. The scrubber can be customized and adapted to your process. Both acidic and alkaline neutralizing agents can be used, and individual equipment configurations are available depending on volume flow and gas types.