Innovations in vacuum and service solutions
Among the exhibits are several innovations and key technologies for semiconductor manufacturing processes.The on-site machine learning and analytics service for semiconductor fabs ARGOS combines production-grade machine learning with decades of vacuum pump and abatement expertise. It converts operational data into prioritized, risk-based actions to increase uptime, reduce total cost-of-ownership, and stabilize yield. This vendor-independent solution operates entirely on the premises, keeping sensitive fab data under customer control.
The UltiDry multi-stage roots vacuum pump from Pfeiffer Vacuum+Fab Solutions is designed for demanding processes that require both robustness and low energy consumption. Its oil-free multi-stage compression ensures clean, dry vacuum without contamination, which is crucial for the sensitive processes in the semiconductor industry.
With a pumping speed of 4,500 l/s for nitrogen, the ATH 4506 M turbomolecular vacuum pump is well suited for semiconductor manufacturing processes. At the booth, visitors can discover this newly launched pump, which comes with an integrated controller that eliminates the need for separate external control units. This design simplifies installation and reduces the space required in the system setup. Different versions are available to match the vacuum pump temperature to individual processes, minimizing condensation and particle buildup, reducing wear, and preventing unplanned downtime. This leads to greater reliability, consistent product quality, and lower total cost-of-ownership for the user.