- Flexible
- Reliable
- Easy servicing
Thermal Gas Treatment
Many industries use harmful gases that must be removed before waste gas is released into the atmosphere. In thermal gas treatment, these substances are destroyed at very high temperatures and then scrubbed in the downstream wet stage. Pfeiffer Vacuum+Fab Solutions offers several different technologies to achieve the most sustainable results.
These solutions are ideal for processes in the semiconductor industry, as well as during the manufacture of photovoltaics, LEDs, and various chemicals.
Each of our abatement systems can be individually adapted to meet your specific requirements. Our team will take a detailed look at your process and recommend the ideal waste gas treatment solution for you.
Benefits
High efficiency and intelligent abatement through adaptive process control
Combustion chamber flushed and cooled with water, greatly extending service intervals
Additional scrubber stage for water-soluble gases and particles that cannot be processed by an exclusively thermal system
Discover our product series
CT-BW burn-wet
Benefits of the CT-BW burn-wet system
The CT-BW burn-wet system offers high cleaning efficiency of process gases and perfluorocarbons (PFCs), with reliable disposal of gaseous and particulate by-products.
This abatement system consumes minimal media thanks to its process-dependent burner power control, optimizing efficiency across varying operating conditions. Its highly flexible configuration allows precise adaptation to specific process requirements. These variations include the number of inputs per module, the type of media, and type of backup. Furthermore, integrated safety features such as a bypass function, temperature monitoring in the water circuit and a gas leakage sensor are included as standard. The CT-BW is reliable, with over 98% availability and minimal maintenance demands. The control cabinet integrated as standard into the CT-BW can operate up to four parallel CT-BW systems, as well as customized backup configurations that are available to ensure continuous operation, even in the event of a fault.
Benefits of the CT-TW thermal-wet system
The CT-TW thermal-wet system is designed for cost-efficient waste gas treatment. It operates without the need for an external fuel gas or oxygen supply, minimizing infrastructure requirements and operating costs. In addition, servicing expenses are low thanks to long maintenance intervals and the low number of wearing parts.
This infrequent and plannable servicing and high system uptime ensure reliable performance with minimal process disruption. The system can be adapted to specific customer requirements with up to six inputs and according to the media type. Furthermore, custom back-up configurations can be implemented to ensure continuous operation, even in the event of a fault.
Benefits of the CT-TW-H thermal-wet hybrid system
The CT-TW-H thermal-wet hybrid system is an electrically heated waste gas treatment solution featuring an integrated wet scrubber and a hydrogen booster. This dedicated booster setup burns injected hydrogen to create a selective increase in combustion temperature when the process and the specific gases require it. This allows for effective treatment of demanding process gases in a wide range of applications.
The system combines low operating costs with long maintenance intervals and high uptime, ensuring minimal disruption. A flexible system architecture means that the CT-TW-H can be customized according to specific customer requirements, with tailored backup configurations available to keep the system running even if a fault occurs.